探針接觸式輪廓儀

三維輪廓儀探針接觸式輪廓儀

4D:  3D測量時序圖

• 3D 成像抓取速度可達190幀/秒 (高可選1000 幀/秒)

• 時間分辨率可達100微秒 (zui快10 微秒可選)

• 動態垂直測量范圍可達200微米

探針接觸式輪廓儀

Smart-surface : UV sensitive polymer

3D形貌測量提供干涉測量級的亞納米分辨率

• 任何物鏡倍率下均保證亞納米垂直分辨率

• 多種可選物鏡，包括長工作距物鏡、玻璃矯正物鏡、水鏡、油鏡等

• 多環境下測量，包括真空、氣氛、液體、透過光學窗口、溫度濕度可控環境等

表征樣品動態響應

• 熱動力學參數響應 (壓強、溫度等)

• 氣氛、液體環境響應 (例如沉積、腐蝕等)

• 機械力或電磁力響應

• 光輻射響應

In-situ : ch

用戶致謝

The researchers from the Netherlands presents a new concept to induce macroscopic morphing in polymer surfaces by an amplified response of a single molecule event. The kinetics of the surface deformation is measured by DHM

Publications:

1. New insights into photoactivated volume generation boost surface morphing in liquid crystal coatings, Danquing Liu & Dirk J.Broer, Nature Communications 6, Article number: 8334 (2015),Protruding organic surfaces triggered by in-plane electric fields, Danqing Liu, Nicholas B. Tito & Dirk J. Broer,  Nature Communications 8, Article number: 1526 (2017), doi:10.1038/s41467-017-01448-w

Nature Communications 6, Article number: 8334 (2015) doi:10.1038/ncomms9334

We are making surface structures can be switched ‘on’ and ‘off’ by external means (at the frequency ranging from several Hertz to hundred Hertz. Digital Holographic Microscope (DHM) has the unique possibility to measure real-time 3D topography in a non-contact and non-scanning manner while keeps the vertical resolution to sub-nanometers

Danqing Liu, The Eindhoven University of Technology